Doppler broadening positron annihilation spectroscopy: A technique for measuring open-volume defects in silsesquioxane spin-on glass films

Applied Physics Letters

Volumn 74, Issue 15, 1999, Pages 2146-2148

  Petkov, Mihail P ^a   Weer, Marc H ^a   Lynn, Kelvin G ^a   Rodbell, Kenneth P ^b   Cohen, Stephan A ^b  

^a WASHINGTON STATE UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; DOPPLER EFFECT; PERMITTIVITY; SPECTROSCOPIC ANALYSIS;

HYDROGEN SILSESQUIOXANE; METHYLSILSESQUIOXANE; POSITRON ANNIHILATION SPECTROSCOPY; SPIN-ON-GLASS FILMS;

OPTICAL FILMS;

EID: 0032621084     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123815     Document Type: Article

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