Positron and positronium annihilation in silica-based thin films studied by a pulsed positron beam

Radiation Physics and Chemistry

Volumn 68, Issue 3-4, 2003, Pages 339-343

  Suzuki, R ^a   Ohdaira, T ^a   Kobayashi, Y ^a   Ito, K ^a   Shioya, Y ^b   Ishimaru, T ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Semiconductor Process Laboratory   (Japan)

^c CANON INC   (Japan)

Author keywords

AMOC; Low k; PALS; Porous material; Positronium; SiO2; Three gamma annihilation

Indexed keywords

POSITRONS; SILICA; SURFACE PHENOMENA;

POSITRONIUM ANNIHILATION;

THIN FILMS;

CARBON; HYDROGEN; SILICON DIOXIDE;

CONFERENCE PAPER; CORRELATION ANALYSIS; DIELECTRIC CONSTANT; ELECTRON; FILM; POROSITY; POSITRON; POSITRONIUM; SPECTROSCOPY;

EID: 0141721284     PISSN: 0969806X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0969-806X(03)00181-6     Document Type: Conference Paper

References (8)

1. 2-Si using positrons. J. Appl. Phys. 76:1994;4935-4982.
2. Hasegawa M., Tabata M., Miyamoto T., Nagashima Y., Hyodo T., Fujinami M., Yamaguchi S. Positron and positronium in free volume in oxides. Mater. Sci. Forum. 175-178:1995;269-278.
3. Shioya, Y., Ikakura, H., Ishimaru, T., Kotake, Y., Yamamoto, Y., Oohira, K., Ohgawara, S., Maeda, K., 2000. Low-k porous silica films deposited by PECVD using polysiloxane. Proceedings of the VLSI Multilevel Interconnection Technology Conference. VMIC Conference Executive Committee, USA, pp. 143-150.
4. Stoll H., Wesolowski P., Koch M., Maier K., Major J.et al. β+γ Age-momentum correlation measurements with an MeV positron beam. Mater. Sci. Forum. 105-110:1992;1989-1992.
5. Suzuki N., Nagai Y., Hyodo T. Can a newly developed AMOC technique be applied to determine the para-positronium lifetime? Radiat. Phys. Chem. 58:2000;777-780.
6. Suzuki R., Ohdaira T., Shioya Y., Ishimaru T. Pore characteristics of low-dielectric-constant films grown by PECVD studied by PALS. Jpn. J. Appl. Phys. 40:2001;L414-416.
7. Suzuki R., Ohdaira T., Mikado T., Venugopal Rao G. Development of high-rate age-momentum correlation system with a variable-energy pulsed positron beam. Mater. Sci. Forum. 363-365:2001;661-663.
8. 2-Si studied by a pulsed slow positron beam. Appl. Surf. Sci. 194:2002;89-96.