Positron annihilation techniques suited for porosity characterization of thin films

Journal of Physical Chemistry B

Volumn 107, Issue 12, 2003, Pages 2725-2734

  Petkov, M P ^a   Wang, C L ^a   Weber, M H ^a   Lynn, K G ^a   Rodbell, K P ^b  

^a WASHINGTON STATE UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFUSION; MESOPOROUS MATERIALS; ORGANIC COMPOUNDS; PERMITTIVITY; POLYMERS; PORE SIZE; POROSITY; POSITRON ANNIHILATION SPECTROSCOPY;

METHYL SILSESQUIOXANE; PORE INTERCONNECTIVITY; POROGEN; POSITRONIUM; THERMALIZATION; TOTAL PERCOLATION;

THIN FILMS;

EID: 0038741863     PISSN: 10895647     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp013947b     Document Type: Article

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