Photo-assisted local oxidation of GaN using an atomic force microscope

Nanotechnology

Volumn 17, Issue 13, 2006, Pages 3299-3303

  Hwang, Jih Shang ^a   Hu, Zhan Shuo ^a   Lu, Ton Yuan ^a   Chen, Li Wei ^a   Chen, Shi Wei ^a   Lin, Tai Yuan ^a   Hsiao, Ching Lien ^b   Chen, Kuei Hsien ^c   Chen, Li Chyong ^b  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DATA STORAGE EQUIPMENT; ELECTRIC FIELD EFFECTS; OXIDATION; SEMICONDUCTOR JUNCTIONS; THRESHOLD VOLTAGE;

ELECTRON-HOLE PAIRS; PHOTO-ASSISTED LOCAL OXIDATION; SCHOTTKY BARRIER;

GALLIUM NITRIDE;

EID: 33746643010     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/13/036     Document Type: Article

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