Fabrication of submicron-scale SrTiO3-δ devices by an atomic force microscope

Applied Physics Letters

Volumn 81, Issue 20, 2002, Pages 3849-3851

  Pellegrino, L ^a   Pallecchi, I ^a   Marre D ^a   Bellingeri, E ^a   Siri, A S ^a  

^a Laboratory of Innovative and Artificial Materials Genoa   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FIELD EFFECT TRANSISTORS; SEMICONDUCTOR DEVICE MANUFACTURE; STRONTIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

SUBMICROMETER SCALE DEVICES;

MAGNETIC THIN FILMS;

EID: 0037065056     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1521583     Document Type: Article

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