Tip-induced local anodic oxidation on the native SiO2 layer of Si(111) using an atomic force microscope

Physical Review B - Condensed Matter and Materials Physics

Volumn 64, Issue 19, 2001, Pages 1953241-1953245

  Ma, Y R ^a   Yu, C ^b   Yao, Y D ^c   Liou, Y ^c   Lee, S F ^c  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON; SILICON DIOXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; MOLECULAR INTERACTION; OXIDATION; REACTION ANALYSIS; SURFACE PROPERTY;

EID: 0035891034     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (32)