Local oxidation of InN and GaN using an atomic force microscope

Nanotechnology

Volumn 17, Issue 3, 2006, Pages 859-863

  Hwang, Jih Shang ^a   Hu, Zhan Shuo ^a   You, Zen Yu ^a   Lin, Tai Yuan ^a   Hsiao, Chin Lian ^b   Tu, Li Wei ^b  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FIELD EFFECT TRANSISTORS; GALLIUM NITRIDE; GOLD; INDIUM COMPOUNDS; OXIDATION; SPUTTER DEPOSITION; THIN FILMS;

GOLD FILMS; LOCAL OXIDATIONS; NANO-OXIDATION; OXYANION;

NANOTECHNOLOGY;

EID: 31044433935     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/3/041     Document Type: Article

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