Growth of silicon oxide on hydrogenated silicon during lithography with an atomic force microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 2952-2956

  Marchi, F ^a   Bouchiat, V ^a   Dallaporta, H ^a   Safarov, V ^a   Tonneau, D ^a   Doppelt, P ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b PSL RESEARCH UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000229527     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590325     Document Type: Article

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