Nanometer-scale conversion of Si3N4 to SiOx

Applied Physics Letters

Volumn 76, Issue 3, 2000, Pages 360-362

  Chien, F S S ^a,c   Chang, J W ^a   Lin, S W ^a   Chou, Y C ^a   Chen, T T ^a   Gwo, S ^a   Chao, T S ^b   Hsieh, W F ^c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000009941     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125754     Document Type: Article

References (14)

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