Scanning probe lithography for nanoimprinting mould fabrication

Nanotechnology

Volumn 17, Issue 12, 2006, Pages 3018-3022

  Luo, Gang ^a   Xie, Guoyong ^a   Zhang, Yongyi ^a   Zhang, Guoming ^a   Zhang, Yingying ^a   Carlberg, Patrick ^a,b   Zhu, Tao ^a   Liu, Zhongfan ^a  

^a PEKING UNIVERSITY   (China)

^b LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ETCHING; LITHOGRAPHY; MICROSCOPIC EXAMINATION; POLYMETHYL METHACRYLATES;

NANOIMPRINTING MOULDS; SCANNING PROBE MICROSCOPE; WET CHEMICAL ETCHING;

NANOSTRUCTURED MATERIALS;

EID: 33746599541     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/12/034     Document Type: Article

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