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Volumn 75, Issue 16, 1999, Pages 2429-2431

Nanomachining of (110)-oriented silicon by scanning probe lithography and anisotropic wet etching

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001092848     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125037     Document Type: Article
Times cited : (101)

References (16)
  • 15
    • 0022211276 scopus 로고
    • edited by C. D. Fung, P. W. Cheung, W. H. Ko, and D. G. Fleming Elsevier, Amsterdam
    • D. L. Kendall and G. R. de Guel, in Micromachining and Micropackaging of Transducers, edited by C. D. Fung, P. W. Cheung, W. H. Ko, and D. G. Fleming (Elsevier, Amsterdam, 1985), pp. 107-124.
    • (1985) Micromachining and Micropackaging of Transducers , pp. 107-124
    • Kendall, D.L.1    De Guel, G.R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.