Fabrication of large-area periodic nanopillar arrays for nanoimprint lithography using polymer colloid masks

Advanced Materials

Volumn 15, Issue 13, 2003, Pages 1065-1068

  Kuo, Chun Wen ^a   Shiu, Jau Ye ^a   Cho, Yi Hong ^a   Chen, Peilin ^a  

^a ACADEMIA SINICA   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MASKS; NANOSTRUCTURED MATERIALS; POLYMERS;

POLYMER COLLOID MASKS;

ELECTRON BEAM LITHOGRAPHY;

EID: 0042347802     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200304824     Document Type: Review

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