Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2965-2969

  Ruchhoeft, P ^a   Colburn, M ^b   Choi, B ^b   Nounu, H ^a   Johnson, S ^b   Bailey, T ^b   Damle, S ^b   Stewart, M ^b   Ekerdt, J ^b   Sreenivasan, S V ^b   Wolfe, J C ^a   Willson, C G ^b  

^a UNIVERSITY OF HOUSTON   (United States)

^b The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038930698     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590935     Document Type: Article

References (12)

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