Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning

Applied Physics Letters

Volumn 86, Issue 16, 2005, Pages 1-16

  Tung, Yi Chung ^a   Kurabayashi, Katsuo ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERIC GRATINGS; GRATING EQUATION; OPTICAL WAVELENGTH TUNING; POLYDIMETHYLSILOXANE (PDMS);

ELASTIC MODULI; ELASTOMERS; FABRY-PEROT INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; TUNING; WAVELENGTH DIVISION MULTIPLEXING;

FIBER BRAGG GRATINGS;

EID: 20844445425     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1900923     Document Type: Article

References (16)

1. H. L. Kung, S. R. Bhalotra, J. D. Mansell, D. A. B. Miller, and J. S. Jarris, Jr., IEEE J. Sel. Top. Quantum Electron. 8, 98 (2002).
2. G. Lammel, S. Schweizer, S. Schiesser, and P. Renaud, J. Microelectromech. Syst. 11, 815 (2002).
3. D. Hohlfeld, M. Epmeier, and H. Zappe, Proceeding of the 15th IEEE International Conference Microelectromechanical Systtem (IEEE, Piscataway, New Jersey, 2002), pp. 564-567.
4. H. Halbritter, M. Aziz, F. Riemenschneider, and P. Meissner, Proc. SPIE 4945, 30 (2003).
5. T. Amano, T. Hino, W. Janto, M. Arai, and F. Koyama, Jpn. J. Appl. Phys., Part 1 43, 157 (2004).
6. M. Datta, M. W. Pruessner, D. P. Kelly, and R. Ghodssi, Solid-State Electron. 48, 1959 (2004).
7. A. Unamuno, L. Li, and D. Uttamchandani, IEEE J. Sel. Top. Quantum Electron. 10, 598 (2004).
8. D. M. Burns and V. M. Bright, Sens. Actuators, A 64, 7 (1998).
9. D. Huh, Y.-C. Tung, H.-H. Wei, J. B. Grotberg, S. J. Skerlos, K. Kurabayashi, and S. Takayama, Biomed. Microdevices 4, 141 (2002).
10. Y.-C. Tung, M. Zhang, C.-T. Lin, K. Kurabayashi, and S. J. Skerlos, Sens. Actuators B 98, 356 (2004).
11. O. J. A. Schueller, D. C. Duffy, J. A. Rogers, S. T. Brittain, and G. M. Whitesides, Sens. Actuators, A 78, 149 (1998).
12. K. Hoshino and I. Shimoyama, J. Micromech. Microeng. 13, 1 (2003).
13. Y. Xie, X. Xu, Y. Hong, and S. Fu, Opt. Express 12, 3894 (2004).
14. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, J. Vac. Sci. Technol. B 14, 4129 (1996).
15. Y. Xia and G. M. Whitesides, Annu. Rev. Mater. Sci. 28, 153 (1998).
16. Y.-C. Tung and K. Kurabayashi, J. Microelectromech. Syst. (to be published in June 2005).