Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation

Applied Physics Letters

Volumn 72, Issue 18, 1998, Pages 2295-2297

  García, Ricardo ^a   Calleja, Montserrat ^a   Pérez Murano, Francesc ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY OF SOLIDS; LITHOGRAPHY; NANOTECHNOLOGY; NATURAL FREQUENCIES; OXIDATION; PROBABILITY; REACTION KINETICS;

OXIDE DOT; SCANNING PROBE MICROSCOPY; THRESHOLD VOLTAGE;

SEMICONDUCTING SILICON;

EID: 0032069968     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121340     Document Type: Article

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