Novel optical elements made from porous Si

Materials Science and Engineering R: Reports

Volumn 52, Issue 4-6, 2006, Pages 93-140

  Kochergin, Vladimir ^a   Foell, Helmut ^b  

^a Lake Shore Cryotronics Inc   (United States)

^b UNIVERSITY OF KIEL   (Germany)

Author keywords

Etching; Filters; Optical components; Polarization component; Porous semiconductor; Waveguide

Indexed keywords

ETCHING; LIGHT POLARIZATION; LIGHT PROPAGATION; OPTICAL FILTERS; OPTICAL WAVEGUIDES; POROUS SILICON;

FILTERS; OPTICAL COMPONENTS; POLARIZATION COMPONENTS; POROUS SEMICONDUCTORS;

OPTICAL DEVICES;

EID: 33745915515     PISSN: 0927796X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mser.2006.05.002     Document Type: Review

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