Protective coatings for interference filters made of porous silicon

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 2, 2003, Pages 370-373

  Corban, R ^a   Bousack, H ^a   Bohn, H G ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; CHEMICAL VAPOR DEPOSITION; MOISTURE; PROTECTIVE COATINGS; SILICA;

INTERFERENCE FILTERS; PLEXIGLAS COATINGS;

POROUS SILICON;

EID: 0037595548     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306527     Document Type: Conference Paper

References (4)

1. M. Thönissen et al., Solid State Phenom. 54, 65 (1997).
2. M. Krüger et al., Opt. Commun. 146, 309 (1998).
3. K. K. Schuegraf, Handbook of Thin-Film Deposition Processes and Techniques (Noyes Publications, Park Ridge, NJ, U.S.A., 1988).
4. A. Thelen, Design of Optical Interference Coatings (McGraw-Hill, NY, U.S.A., 1988).