Crystal orientation and electrolyte dependence for macropore nucleation and stable growth on p-type Si

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 69, Issue , 2000, Pages 194-198

  Christophersen, M ^a   Carstensen, J ^a   Feuerhake, A ^a   Foil, H ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ANODIC OXIDATION; ASPECT RATIO; CRYSTAL ORIENTATION; ELECTROLYTES; ETCHING; HYDROGEN; NUCLEATION; PASSIVATION; SEMICONDUCTOR GROWTH; SUBSTRATES;

ANISOTROPIC PORE GROWTH; MACROPORES;

SEMICONDUCTING SILICON;

EID: 0033895958     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00262-7     Document Type: Article

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