Macroporous silicon-based polarization components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5515, Issue , 2004, Pages 132-141

  Kochergin, Vladimir ^a   Christophersen, Marc ^a   Swinehart, Philip R ^a  

^a Lake Shore Cryotronics Inc   (United States)

Author keywords

Deep ultraviolet; Elongated pores; Macroporous silicon; Polarizer; Waveguide array

Indexed keywords

DEEP ULTRAVIOLET; ELONGATED PORES; MACROPOROUS SILICON; POLARIZERS; WAVEGUIDE ARRAYS;

COATINGS; FABRICATION; MULTILAYERS; OPTICAL MATERIALS; OPTICAL WAVEGUIDES; POROSITY; SILICON; ULTRAVIOLET RADIATION;

LIGHT POLARIZATION;

EID: 13244252338     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.557397     Document Type: Conference Paper

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