Crystal orientation dependence of macropore formation in n-Si with backside-illumination in HF-electrolyte

Journal of Porous Materials

Volumn 7, Issue 1, 2000, Pages 353-356

  Ronnebeck S ^a   Ottow, S ^a   Carstensen, J ^a   Foll H ^a  

^a Faculty of Engineering   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DISSOLUTION; ELECTRIC POTENTIAL; ELECTROLYTES; ETCHING; HYDROFLUORIC ACID; POLISHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON;

ANODIC ETCHING;

POROUS SILICON;

EID: 0342298438     PISSN: 13802224     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1009639105357     Document Type: Article

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8. S. Takeda and M. Kohyama in Microscopy of Semiconducting Materials, edited by A.G. Cullis, A.E. Staton-Bevan, and J.L. Hutchinson (Royal Microscopical Society, Oxford, 1993), p. 33.