Stabilization of dual-axis micromirrors beyond the pull-in point by integral sliding mode control

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1242-1250

  Zhao, Yi ^a   Tay, Francis E H ^a   Chau, Fook Siong ^a   Zhou, Guangya ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; STABILITY; STABILIZATION; TORQUE;

CLOSED-LOOP SYSTEM; DUAL-AXIS MICROMIRRORS; INTEGRAL SLIDING MODE CONTROL (ISMC); NONLINEAR ELECTROSTATIC TORQUES;

MIRRORS;

EID: 33745096219     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/018     Document Type: Article

References (42)

1. Ford J E, Aksyuk V A, Bishop D J and Walker J A 1999 Wavelength add-drop switching using tilt micromirrors J. Lightwave Technol. 5 904-11
2. Lee S-S, Huang L-S, Kim C-J and Wu M C 1999 Free-space fiber optic switches based on MEMS vertical torsion mirrors J. Lightwave Technol. 17 7-13
3. Hagelin P M, Krishnamoorthy U, Arft C M, Heritage J P and Solgaard O 1999 Scalable fiber optic switch using micromachined mirrors Proc. Transducers'99 p 2P6-2
4. Kiang M H, Solgaard O, Lau K Y and Muller R 1998 Polysilicon optical microscanners for laser scanning displays Sensors Actuators A 70 195-9
5. Conant R A, Hagelin M P M, Krishnamoorthy U and Solgaard O 1999 A raster-scanning full-motion video display using polysilicon micromachined measured mirrors Proc. Transducers'99 p 2P3-2
6. Dickensheets D L and Kino G S 1998 Silicon-micromachined scanning confocal optical microscope J. Microelectromech. Syst. 7 37-8
7. Pan Y T, Xie H K and Fedder G K 2001 Endoscopic optical coherence tomography based on a microelectromechanical mirror Opt. Lett. 26 1966-8
8. Toshiyoshi H, Piyamattanametha W, Chan C T and Wu M C 2001 Linearization of electrostatically actuated surface micromachined 2-D optical scanner J. Microelectromech. Syst. 10 205-14
9. Zhao Y, Tay F E H, Chau F S and Zhou GY 2005 Linearization of the scanning field for 2D torsional micromirror by RBF neural network Sensors Actuators A 121 230-6
10. Zhao Y, Tay F E H, Chau F S and Zhou G Y 2005 A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror J. Micromech. Microeng. 15 1972-8
11. Degani O et al 1998 Pull-in study of an electrostatic torsion actuator J. Microelectromech. Syst. 7 373-8
12. Nemirovsky Y and Bochobza-Degani O 1998 A methodology and model for the pull-in parameters of electrostatic actuators J. Microelectromech. Syst. 10 601-15
13. Xiao Z, Peng W, Wu XingTao and Farmer K R 2002 Pull-in study for round double-gimbaled electrostatic torsion actuators J. Micromech. Microeng. 12 77-81
14. Degani O and Nemirovsky Y 2002 Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions J. Microelectromech. Syst. 11 20-7
15. Elata D, Bochobza-Degani O and Nemirovsky Y 2003 Analytical approach and numerical α-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources J. Microelectromech. Syst. 12 681-92
16. Bochobza-Degani O and Nemirovsky Y 2004 Experimental verification of a design methodology for torsion actuators based on a rapid pull-in solver J. Microelectromech. Syst. 13 121-30
17. Hung E S and Senturia S D 1998 Leveraged bending for full-gap positioning with electrostatic actuation Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, USA) pp 83-6
18. Hung E S and Senturia S D 1999 Extending the travel range of analogtuned electrostatic actuators J. Microelectromech. Syst. 8 497-505
19. Kudrle T D et al 2003 Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems (Boston, MA) pp 360-3
20. Pu C et al 2004 Electrostatic actuation of three-dimensional mems mirrors using sidewall electrodes IEEE J. Sel. Top. Quantum Electron. 10 472-8
21. Seeger J I and Crary S B 1997 Stabilization of electrostatically actuated mechanical devices Transducers'97 pp 1133-6
22. Seeger J I and Boser B E 1999 Dynamics and control of parallel-plate actuators beyond the electrostatic instability Transducers'99 pp 474-7
23. Seeger J I and Boser B E 2003 Charge control of parallel-plate, electrostatic actuators and the tip-in instability J. Microelectromech. Syst. 12 656-71
24. Nadal-Guardia R, Brosa Anna Maria and Deh A 2003 Constant charge operation of capacitor sensors based on switched-current circuits IEEE Sensors J. 3 835-42
25. Chu P B and Pister K S J 1994 Analysis of closed-loop control of parallelplate electrostatic microgrippers Proc. IEEE Int. Conf. Robotics and Automation pp 820-5
26. Lu M S-C and Fedder G K 2002 Closed-loop control of parallel-plate microactuator beyond the pull-in limit Tech. Dig. IEEE Solid-State Sensor Actuator Workshop (Hilton Head Island, SC) pp 255-8
27. Nadal-Guardia R, Dehe A, Aigner R and Castaner L M 2002 Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point J. Microelectromech. Syst. 11 255-63
28. Sun Yu, Piyabongkarn D, Sezen A, Nelson B J and Rajamani R 2002 A high-aspect-ratio two-axis electrostatic microactuator with extended travel range Sensors Actuators A 102 49-60
29. Juneau T, Unterkofler K, Seliverstov T, Zhang S and Judy M 2003 Dual-axis optical mirror positioning using a nonlinear closed-loop controller Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems (Boston, MA) pp 560-3
30. Yazdi N, Sane H, Kudrle T D and Mastrangelo C H 2003 Robust slidingmode control of electrostatic torsional micromirrors beyond the pull-in limit Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems (Boston, MA) pp 1450-3
31. Chen J, Weingartner W, Azarov A and Giles R C 2004 Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point J. Microelectromech. Syst. 13 988-97
32. Chu P B et al 2005 Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch J. Microelectromech. Syst. 14 261-73
33. Utkin V and Shi J 1996 Integral sliding mode in systems operating under uncertainty conditions Proc. 35th Conf. on Decision and Control (Kobe, Japan) pp 4591-6
34. Lee J-H, Allaire P E, Tao G and Zhang X 2001 Integral sliding-mode control of a magnetically suspended balance beam: analysis, simulation and experiment IEEE/ASME Trans. Mechatronics 6 338-46
35. Chern T and Wu Y 1993 Design of brushless DC position servo systems using integral variable structure approach IEE Proc. Electr. Power Appl. 140 27-34
36. Chern T-L and Wu Y-C 1992 An optimal variable structure control with integral compensation for electrohydraulic position servo control systems IEEE T. Ind. Electron. 39 460-3
37. Sbarbaro D 1996 Application of integral variable structure controllers Proc. IEEE International Conf. on Control Applications (Dearborn, MI) pp 673-8
38. Basin M, Gonzalez J R, Acosta P and Fridman L 2003 Robust integral sliding mode regulator for linear systems with time delay in control input Proc. Am. Control Conf. vol 3 pp 2138-43
39. Hung J Y 1993 Variable structure control: a survey IEEE T. Ind. Electron. 40 2-22
40. Utkin V I 1981 Sliding Modes in Control Optimization (Berlin: Springer)
41. Ertugrul M, Kaynak O, Sabanovic A and Ohnishi K 1996 A generalized approach for Lyapunov design of sliding mode controllers for motion control applications Proc. Advanced Motion Control Conf. pp 407-12
42. Slotine J J and Li W 1991 Applied Nonlinear Control (Englewood Cliffs, NJ: Prentice-Hall)