Analytical approach and numerical α-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 681-691

  Elata, David ^a   Bochobza Degani, Ofir ^a   Nemirovsky, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Electrostatic actuator; Multiple voltage sources; Pull in

Indexed keywords

MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NUMERICAL METHODS; OPTIMIZATION; VOLTAGE CONTROL;

MULTIPLE UNCOUPLED VOLTAGE SOURCE; PULL IN HYPER SURFACE EXTRACTION;

ELECTROSTATIC ACTUATORS;

EID: 0242636510     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.818456     Document Type: Article

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