Linearization of the scanning field for 2D torsional micromirror by RBF neural network

Sensors and Actuators, A: Physical

Volumn 121, Issue 1, 2005, Pages 230-236

  Zhao, Yi ^a   Tay, Francis E H ^a   Chau, Fook Siong ^a   Zhou, Guangya ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

2D torsional micromirror; Linearization; MEMS; RBF neural network

Indexed keywords

COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; DATA ACQUISITION; ELECTRIC DISTORTION; ELECTROSTATIC ACTUATORS; EMBEDDED SYSTEMS; LINEARIZATION; MICROELECTROMECHANICAL DEVICES; MIRRORS; SCANNING;

2D TORSIONAL MICROMIRROR; ANALOG HARDWARE DESCRIPTION LANGUAGE (AHDL); DYNAMIC LINK LIBRARY (DLL); RBF NEURAL NETWORKS; TWO INPUTS TWO OUTPUTS (TITO);

RADIAL BASIS FUNCTION NETWORKS;

EID: 21744434112     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.02.004     Document Type: Article

References (22)

1. P.M. Hagelin, U. Krishnamoorthy, C.M. Arft, J.P. Heritage, and O. Solgaard Scalable fiber optic switch using micromachined mirrors Proceedings of the Transducers'99 Sendai, Japan, June 7-10 1999 2P6-2
2. M.-H. Kiang, O. Solgaard, K.Y. Lau, and R. Muller Polysilicon optical microscanners for laser scanning displays Sens. Actuators A 70 1998 195 199
3. R.A. Conant, P.M. Hagelin, U. Krishnamoorthy, and O. Solgaard A raster-scanning full-motion video display using polysilicon micromachined measured mirrors Proceedings of the Transducers'99 Sendai, Japan, June 7-10 1999 2P3-2
4. D.L. Dickensheets, and G.S. Kino Silicon-micromachined scanning confocal optical microscope J. Microelectromech. Syst. 7 1998 37 38
5. Y.T. Pan, H.K. Xie, and G.K. Fedder Endoscopic optical coherence tomography based on a microelectromechanical mirror Opt. Lett. 2001 1966 1968
6. A. Debray, A. Ludwig, T. Bourouina, A. Asaoka, N. Tiercelin, G. Reyne, T. Oki, E. Quandt, H. Muro, and H. Fujita Application of a multilayered magnetostrictive film to a micromachined 2-D optical scanner J. Microelectromech. Syst. 13 2004 264 271
7. A. Garnier, T. Bourouina, E. Orsier, T. Masuzawa, H. Fujita, T. Hiramoto, and J.-C. Peuzin A fast simple and robust 2D micro-optical scanner based on contactless magnetostrictive actuation Proceedings of the MEMS'2000 Miyazaki, Japan 2000 715 720
8. S. Schweizer, P. Cousseau, G. Lamel, S. Calmes, and P. Renaud Two-dimensional thermally actuated optical microscanner Proceedings of the Eurosensors XIII The Hague, The Netherlands 1999 29 32
9. T. Kawabata, M. Ikeda, H. Goto, M. Matsumoto, and T. Yada The 2-dimensional micro scanner integrated with PZT thin film actuator Proceedings of the Transducers'97 Chicago 1997 339 342
10. N. Asada, H. Matsuki, K. Minami, and M. Esashi Silicon micromachined galvano optical scanner IEEE Trans. Magn. 30 1994 4647 4649
11. R.A. Conant, P.M. Hagelin, U. Krishnamoorthy, O. Slogaard, K.Y. Lau, and R.S. Muller A raster-scanning full-motion video display using polysilicon micromachined mirrors Proceedings of the Transducers'99 Sendai, Japan 1999 376 379
12. H. Toshiyoshi, W. Piyamattanametha, C.-T. Chan, and M.C. Wu Linearization of electrostatically actuated surface micromachined 2-D optical scanner J. Microelectromech. Syst. 10 2001 205 214
13. G. Zhou, F.E.H. Tay, and F.S. Chau Macro-modelling of a double-gimballed electrostatic torsional micromirror J. Micromech. Microeng. 13 2003 532 547
14. D.S. Broomhead, and D. Lowe Multivariable functional interpolation and adaptive networks Complex Syst. 2 1988 321 355
15. G. Bugmann Normalized Gaussian radial basis function networks Neurocomputing 20 1998 97 110
16. S. Geva, K. Malmstrom, and J. Sitte Local cluster neural net: architecture, training, and applications Neurocomputing 20 1998 35 56
17. L. Yingwei, N. Sundararajan, and P. Saratchandran Performance evaluation of a sequential minimal radial basis function (RBF) neural network learning algorithm IEEE Trans. Neural Networks 9 1998 308 318
18. Q. Zhu, Y. Cai, and L. Liu A global learning algorithm for a RBF network Neural Networks 12 1999 527 540
19. K. Shibata, and K. Ito Gauss-sigmoid neural network Proceedings of the International Joint Conference on Neural Networks, IJCNN'99 10-16 July 1999 1203 1208
20. S. Haykin Neural Networks: A Comprehensive Foundation 2nd ed. 1999 Prentice-Hall
21. J.K. Sing, D.K. Basu, M. Nasipuri, and M. Kundu Improved k-means algorithm in the design of RBF neural networks Proceedings of the Conference on Convergent Technologies for Asia-Pacific Region, TENCON 2003 15-17 October 2003 841 845
22. H.T. Lau A Numerical Library in C for Scientists and Engineers 1995 CRC Press Boca Raton