Constant charge operation of capacitor sensors based on switched-current circuits

IEEE Sensors Journal

Volumn 3, Issue 6, 2003, Pages 835-842

  Nadal Guardia, Rafael ^a   Brosa, Anna Maria ^a   Dehé, Alfons ^a  

^a EUROPEAN PATENT OFFICE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRIVES; ELECTRIC CURRENTS; ELECTRIC EXCITATION; ELECTROSTATIC ACTUATORS; LEAKAGE CURRENTS; SWITCHING CIRCUITS; VOLTAGE MEASUREMENT;

CAPACITATIVE SENSING; CAPACITOR SENSORS; ELECTROSTATIC TRANSDUCERS; POST PULL-IN OPERATION;

SENSORS;

EID: 3042761606     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.820355     Document Type: Article

References (22)

1. L.K.Baxter, Capacitive Sensors Design and Applications. New York: IEEE, 1997.
2. S. M. Sze, Semiconductor Sensors. New York: Wiley, 1994.
3. M. Füldner, A. Dehé, R. Aigner, T. Bever, and R. Lerch, "Silicon mi crophones with low stress membranes," in Proc. 11th Int. Conf. Solid-State Sensors and Actuators (Transducers'01), Munich, Germany, June 10-14, 2001, pp. 126-133.
4. L. Castañer and S. D. Senturia, "Speed-energy optimization of electro static actuators based on pull-in," J. Microelectromech. Syst., vol. 8, no. 3, pp. 290-298, 1999.
5. H. C. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, "The resonant gate transistor," IEEE Trans. Electron Devices, vol. ED-14, pp. 117-133, Mar. 1967.
6. J. I. Seeger and S. B. Crary, "Stabilization of electrostatically actuated mechanical devices," in Proc 1997 Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, pp. 1133-1136.
7. J. I. Seeger and B. E. Boser, "Dynamics and control of parallel-plate actuators beyond the electrostatic instability," in Proc. 10th Int. Conf. on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, June 7-10, 1999.
8. E. S. Hung and S. D. Senturia, "Extending the travel range of analog tuned electrostatic actuators," J. Microelectromech. Syst., vol. 8, no. 4, Dec. 1999.
9. E. K. Chan and R. W. Dutton, "Electrostatic micromechanical actuator with extended range of travel," J. Microelectromech. Syst., vol. 9, no. 3, pp. 321-328, 2000.
10. E. S. Hung and S. D. Senturia, "Leveraged bending for full gap posi tioning with electrostatic actuation," in Proc. Solid State Sensor and Ac tuator Workshop, Hilton Head, SC, 1998, pp. 98-100.
11. R. Nadal-Guardia, A. Dehé, R. Aigner, and L. Castañer, "Current drive methods to extend the range of travel of electrostatic microactuators be yond the voltage pull-in point," J. Microelectromech. Syst., 2002.
12. R. Nadal-Guardia, "Current Mode Drive of Electrostatic Microactua tors," Ph.D. dissertation, Univ. Politècnica de Catalunya, Barcelona, Spain, 2001.
13. R. Nadal-Guardia, R. Aigner, W. Nessler, M. Handtmann, and L. Cas tañer, "Control of torsional electrostatic actuators by current driving," in 3rd ASDAM Conf, Smolenice Castle, Slovakia, Oct. 16-18, 2000, pp. 91-94.
14. R. Nadal-Guardia, A. Dehé, R. Aigner, and L. Castañer, "New current drive method to extend the stable operation range of electrostatic actua tors: Experimental verification," in Proc. 11th Int. Conf. Solid-State Sen sors and Actuators (Transducers'01), Munich, Germany, June 10-14, 2001, pp. 760-763.
15. L. Castañer, J. Pons, R. Nadal-Guardia, and A. Rodríguez, "Analysis of the extended operation range of electrostatic actuators by current-pulse drive," Sens. Actuators A, 2001.
16. C. D. Sander, J. W. Knutti, and J. D. Meindl, "A monolithic capacitive pressure sensor with pulse period output," IEEE Trans. Electron Devices, vol. ED-27, p. 307, Mar. 1980.
17. A. Kjensmo, A. Hanneborg, J. Gakkestad, and H. van Der Lippe, "A CMOS front-end circuit for a capacitive pressure sensor," Sens. Actua tors, vol. A-21-A23, p. 102, 1990.
18. R. Nadal-Guardia, A. M. Brosa, and A. Dehé, "AC transfer function of electrostatic capacitive sensors based on the 1-D equivalent model: Ap plication to silicon microphones," J. Microelectromech. Syst., submitted for publication.
19. C. Tomazou, J. B. Hughes, and N. C. Battersby, Switched-Currents: An Analog Technique for Digital Technology. London, U.K.: Peregrinus, 1993.
20. Y. Tsividis, Operation and Modeling of the MOS Transistor, 2nd ed. New York: McGraw-Hill, 1999.
21. SpectreHDL Reference Manual, 4.4.1 ed., Cadence Design Systems, Inc., 1997.
22. L. E. Kinsler, J. V. Sanders, and A. R. Frey, Fundamentals of Acoustics, 3rd ed. New York: Wiley, 1982.