Stabilization of electrostatically actuated mechanical devices

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1133-1136

  Seeger, Joseph I ^a   Crary, Selden B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTROSTATICS; SEMICONDUCTOR DEVICE MODELS; STABILITY; VOLTAGE CONTROL;

ELECTROSTATICALLY ACTUATED DEVICES; ELECTROSTATICS STABILITY CONTROL; FORCE BALANCE EQUATION; SERIES CAPACITANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0030655635     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)