Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 261-273

  Chu, Patrick B ^a   Brener, Igal ^b,c   Pu, Chuan ^d   Lee, Shi Sheng ^e   Dadap, Jerry I ^f   Park, Sangtae ^g   Bergman, Keren ^f   Bonadeo, Nicolas H ^h   Chau, Tai ⁱ   Chou, Ming ^h   Doran, Robert A ^j   Gibson, Rick ^h   Harel, Roey ^k   Johnson, John J ^h   Lee, C Daniel ^l   Peale, David R ^m   Tang, Bo ^h   Tong, Dennis T K ⁿ   Tsai, Ming Ju ^o   Wu, Qi ^p   Zhong, William ^h   Goldstein, Evan L ^h   Lin, Lih Y ^q   Walker, James A ^r   more..

^a SEAGATE TECHNOLOGY   (United States)

^b GE HEALTHCARE   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d LEHIGH UNIVERSITY   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f Och Spine at New York Presbyterian Hospitals   (United States)

^g Applied MEMS Inc   (United States)

^h Tellium Inc   (United States)

ⁱ RAYTHEON COMPANY   (United States)

^j Symbol Technologies Inc   (United States)

^k Kodeos Communications   (United States)

^l Inplane Photonics   (United States)

^m KLA TENCOR CORPORATION   (United States)

ⁿ HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^o Tessera Inc   (United States)

^p Corning Inc ^*  (United States)

^q UNIVERSITY OF WASHINGTON   (United States)

^r JayWalker Technical Consulting   (United States)

more..

Author keywords

Electrostatic actuator; Microelectromechanical systems (MEMS); Nonlinear closed loop control; Optical cross connects; Snap down; Torsional spring

Indexed keywords

ALGORITHMS; CLOSED LOOP CONTROL SYSTEMS; CONTROL SYSTEM SYNTHESIS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; MIRRORS; NONLINEAR CONTROL SYSTEMS; OPTICAL SWITCHES; SERVOMECHANISMS; SILICON; SINGLE CRYSTALS;

NONLINEAR CLOSED LOOP CONTROL; OPTICAL CROSS CONNECT; TORSIONAL SPRING;

MICROELECTROMECHANICAL DEVICES;

EID: 21044454316     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839827     Document Type: Article

References (24)

1. P. B. Chu, S. S. Lee, and S. Park, "MEMS: The path to large optical crossconnects," IEEE Commun. Mag., vol. 40, no. 3, pp. 80-87, Mar. 2002.
2. A. S. Dewa, J. W. Orcutt, M. Hundson, D. Krozier, A. Richards, and H. Laor, "Development of a silicon two-axis micromirror for an optical cross-connect," in Tech. Dig. IEEE Solid-State Sensor Actuator Workshop, Hilton Head Island, SC, 2000, pp. 93-96.
3. R. Ryf et al., "1296-port MEMS transparent optical crossconnect with 2.07 petabit switch capacity," in Tech. Dig. Optical Fiber Conference 2001, Anaheim, CA, 2001.
4. D. J. Bishop, C. R. Giles, and G. P. Austin, "The Lucent LambdaRouter: MEMS technology of the future here today," IEEE Commun. Mag., vol. 40, no. 3, pp. 75-79, Mar. 2002.
5. J. H. Smith, S. S. Nasiri, J. Bryzek, M. Novack, J. B. Starr, H. Kwon, A. F. Flannery, D. L. Marx, Z. Chen, and E. Sigari, "1200 mirror array integrated with CMOS for photonic switching: Application of mechanical leveraging and torsional electrostatic actuation to reduce drive voltage requirements and increase angular tilt," in Tech. Dig. IEEE Solid-State Sensor Actuator Workshop, Hilton Head Island, SC, 2002, pp. 378-379.
6. O. Degani et al., "Pull-in study of an electrostatic torsion actuator," J. Microelectromech. Syst., vol. 7, no. 4, pp. 373-378, Dec. 1998.
7. Y. Nemirovsky and O. Bochobza-Degani, "A methodology and model for the pull-in parameters of electrostatic actuators," J. Microelectromech. Syst., vol. 10, no. 4, pp. 601-515, Dec. 1998.
8. P. B. Chu and K. S. J. Pister, "Analysis of closed-loop control of parallelplate electrostatic microgrippers," in Proc. IEEE Int. Conf. on Robotics & Automation, San Diego, CA, 1994, pp. 820-825.
9. M. S.-C. Lu and G. K. Fedder, "Closed-loop control of parallel-plate microactuator beyond the pull-in limit," in Tech. Dig. IEEE Solid-State Sensor Actuator Workshop, Hilton Head Island, SC, 2002, pp. 255-258.
10. E. S. Hung and S. D. Senturia, "Extending the travel range of analog-tuned electrostatic actuators," J. Microelectromech. Syst., vol. 8, no. 4, pp. 497-505, Dec. 1999.
11. T. D. Kudrle et al., "Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes," in Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems, Boston, MA, 2003, pp. 360-363.
12. C. Pu, S. Park, P. Chu, S.-S. Lee, M. Tsai, D. Peale, N. Bonadeo, and I. Brener, "Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes," in Proc. Int. Conf. on Optical MEMS and Their Applications, Waikoloa, HI, 2003.
13. I. Brener et al., "Nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch," in Proc. OFC, vol. 1, 2003, pp. 385-386.
14. T. Juneau, K. Unterkofler, T. Seliverstov, S. Zhang, and M. Judy, "Dual-axis optical mirror positioning using a nonlinear closed-loop controller," in Proc. 12th Int. Conf. on Solid State Sensors. Actuators and Microsystems, Boston, MA, 2003, pp. 560-563.
15. N. Yazdi, H. Sane, T. D. Kudrle, and C. H. Mastrangelo, "Robust slidingmode control of electrostatic torsional micromirrors beyond the pull-in limit," in Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems, Boston, MA, 2003, pp. 1450-1453.
16. S. Blackstone and T. J. Brosnihan, Proc. IEEE/LEOS Int. Conf. Optical MEMS '01, Okinawa, Japan, 2001, pp. 35-36.
17. T. J. Brosnihan et al., "Optical IMEMS-A fabrication process for MEMS optical switches with integrated on-chip electronics," in Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems, Boston, MA, 2003, pp. 1638-1642.
18. K. E. Petersen, "Silicon as a mechanical material," Proc. IEEE, vol. 70, pp. 420-457, 1982.
19. P. B. Chu et al., "Controlled pulse-etching with xenon difluoride," in Proc. 9th Int. Conf. on Solid State Sensors, Actuators and Microsystems, Chicago, IL, 1997, pp. 665-668.
20. X. Wang, M. Judy, and J. White, "Validating fast simulation of air damping in micromachined devices," in Tech. Digest of 15th IEEE Int. Conf. on MEMS, 1999, pp. 210-213.
21. T. Roessig. (2002) Mirrors With Integrated Position-Sense Electronics for Optical-Switching Applications. Analog Dialogue by Analog Devices Inc. [Online]. Avallable: www.analog.com
22. G. F. Franklin et al., Digital Control of Dynamic Systems. Menlo Park, CA: Addison Wesley, 1998, pp. 323-325.
23. J. I. Dadap, P. B. Chu, I. Brener, C. Pu, C. D. Lee, K. Bergman, N. Bonadeo, T. Chau, M. Chou, R. Doran, R. Gibson, R. Harel, J. J. Johnson, S. S. Lee, S. Park, D. R. Peale, R. Rodriguez, D. Tong, M. Tsai, C. Wu, W. Zhong, E. L. Goldstein, L. Y. Lin, and J. A. Walker, "Modular MEMS-based optical cross-connect with large port-count," IEEE Photon. Technol. Lett., vol. 15, pp. 1773-1775, 2003.
24. Y. Reznichenko, M. Judy, and S. Zhang, "Measuring the optical and electromechanical properties of MEMS mirrors," in Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems, Boston, MA, 2003, pp. 1466-1469.