A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1972-1978

  Zhao, Yi ^a   Tay, Francis E H ^a   Chau, Fook Siong ^a   Zhou, Guangya ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; INTERPOLATION; SCANNING; TORQUE;

DELAUNAY TRIANGULATION (DT); DISTORTION RATES; DUAL-AXIS MICROMIRROR; LINEAR SCANNING;

NONLINEAR SYSTEMS;

EID: 24644518021     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/025     Document Type: Article

References (30)

1. Hagelin P M, Krishnamoorthy U, Arft C M, Heritage J P and Solgaard O 1999 Scalable fiber optic switch using micromachined mirrors Proc. Transducers'99 2P6-2
2. Kiang M H, Solgaard O, Lau K Y and Muller R 1998 Polysilicon optical microscanners for laser scanning displays Sensors Actuators A 70 195-9
3. Conant R A, Hagelin P M, Krishnamoorthy U and Solgaard O 1999 A raster-scanning full-motion video display using polysilicon micromachined measured mirrors Proc. Transducers'99 2P3-2
4. Dickensheets D L and Kino G S 1998 Silicon-micromachined scanning confocal optical microscope J. Microelectromech. Syst. 7 37-8
5. Pan Y T, Xie H K and Fedder G K 2001 Endoscopic optical coherence tomography based on a microelectromechanical mirror Opt. Lett. 26 1966-8
6. Conant R A, Hagelin P M, Krishnamoorthy U, Slogaard O, Lau K Y and Muller R S 1999 A raster-scanning full-motion video display using polysilicon micromachined mirrors Proc. Transducers'99 pp 376-9
7. Hao Z, Wingfield B, Whitley M, Brooks B and Hammer J A 2003 A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror J. Microelectromech. Syst. 12 692-701
8. Xiao Z, Peng W, Wu X T and Farmer K R 2002 Pull-in study for round double-gimbaled electrostatic torsion actuators J. Micromech. Microeng. 12 77-81
9. Chen J, Weingartner W, Azarov A and Giles R C 2004 Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point J. Microelectromech. Syst. 13 988-97
10. Toshiyoshi H, Piyamattanametha W, Chan C T and Wu M C 2001 Linearization of electrostatically actuated surface micromachined 2-D optical scanner J. Microelectromech. Syst. 10 205-14
11. Zhou G Y, Tay E H F and Chau F S 2003 Macro-modelling of a double-gimballed electrostatic torsional micromirror J. Micromech. Microeng. 13 532-47
12. Evoy S, Carr D W, Sekaric L, Olkhovets A, Parpia J M and Craighead H G 1999 Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators J. Appl. Phys. 86 6072-7
13. Zhao Y, Tay E H F, Chau F S and Zhou G Y 2005 Linearization of the scanning field for 2D torsional micromirror by RBF neural network Sensors Actuators A 121 230-6
14. Juneau T, Unterkofler K, Seliverstov T, Zhang S and Judy M 2003 Dualaxis optical mirror positioning using a nonlinear closed-loop controller Proc. Transducers'03 pp 560-3
15. Yazdi N, Sane H, Kudrle T D and Mastrangelo C H 2003 Robust slidingmode control of electrostatic torsional micromirrors beyond the pull-in limit Proc. Transducers'03 pp 1450-3
16. Chen J, Weingartner W, Azarov A and Giles R C 2004 Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point J. Microelectromech. Syst. 13 988-97
17. Chu P B et al 2005 Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch J. Microelectromech. Syst. 14 261-73
18. Li X Y, Calinescu G, Wan P and Wang Y 2003 Localized Delaunay triangulation with application in ad hoc wireless networks IEEE Trans. Parallel Distrib. Syst. 14 1035-47
19. Lertrattanapanich S and Bose N K 2002 High resolution image formation from low resolution frames using Delaunay triangulation IEEE Trans. Image Process. 11 1427-41
20. Jin L, Pierna J A, Xua Q, Wahlb F, Noord O E, Saby C A and Massart D L 2003 Delaunay triangulation method for multivariate calibration Anal. Chim. Acta 448 1-14
21. Wrazidlo W, Brambs H J, Lederer W, Schneider S, Geiger B and Fischer C 1991 An alternative method of three-dimensional reconstruction from two-dimensional CT and MR data sets Eur. J. Radiol. 12 11-6
22. Watson D F 1992 Contouring: A Guide to the Analysis and Display of Spatial Data (Oxford: Pergamon)
23. Delaunay B N 1934 Sur la sphre vide Izv. Akad. Nauk SSSR 7 793-800
24. Lee D T and Schachter B J 1980 Two algorithms for constructing a Delaunay triangulation Int. J. Comput. Inform. Sci. 9 219-42
25. Sloan S W and Houlsy G T 1984 An implementation of Watson's algorithm for computing 2-dimensional Delaunay triangulations Adv. Eng. Softw. 6 192-8
26. Lawson C L 1986 Properties of N-dimensional triangulations Comput. Aided Geom. Des. 3 231-46
27. Sloan S W 1987 A fast algorithm for constructing Delaunay triangulations in the plane Adv. Eng. Softw. 9 34-55
28. Schroeder W J and Shephard M S 1988 Geometry-based fully automatic mesh generation and the Delaunay triangulation Int. J. Numer. Methods Eng. 26 2503-15
29. Sapidis N and Perucchio R 1991 Delaunay triangulation of arbitrarily shaped planar domains Comput. Aided Geom. Des. 8 421-37
30. Du C 1996 An algorithm for automatic Delaunay triangulation of arbitrary planar domains Adv. Eng. Softw. 27 21-6