Robust sliding-mode control of electrostatic torsional micromirrors beyond the pull-in limit

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1450-1453

  Yazdi, N ^a   Sane, H ^a   Kudrle, T D ^a   Mastrangelo, C H ^a  

^a Corning IntelliSense Corp ^*  (United States)

Author keywords

Electrostatics; Force control; Micromechanical devices; Micromirrors; Mirrors; Nonlinear optics; Optical losses; Optical sensors; Robust control; Sliding mode control

Indexed keywords

ACTUATORS; ELECTROSTATICS; FORCE CONTROL; MICROSYSTEMS; MIRRORS; NONLINEAR OPTICS; OPTICAL LOSSES; OPTICAL SENSORS; ROBUST CONTROL; SLIDING MODE CONTROL; TRANSDUCERS;

DEVICE CHARACTERISTICS; ELECTROSTATIC TORSIONAL MICROMIRRORS; EXTENSIVE SIMULATIONS; INHERENT INSTABILITY; MICRO MIRROR; MICROMECHANICAL DEVICE; PULL-IN INSTABILITY; ROBUST SLIDING MODE;

SOLID-STATE SENSORS;

EID: 33747596922     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217049     Document Type: Conference Paper

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