Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 360-363

  Kudrle, T D ^a   Shedd, G M ^a   Wang, C C ^a   Hsiao, J C ^a   Bancu, M G ^a   Kirkos, G A ^a   Yazdi, N ^a   Waelti, M ^a   Sane, H ^a   Mastrangelo, C H ^a  

^a Corning Intellisense ^*  (United States)

Author keywords

Dynamic range; Electrodes; Electrostatic actuators; Geometry; Mirrors; Solid modeling; Solid state circuits; Torque; Transducers; Voltage

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; GEOMETRY; MICROSYSTEMS; MIRRORS; PLATES (STRUCTURAL COMPONENTS); ROTATION; SOLID-STATE SENSORS; TORQUE; TRANSDUCERS;

DYNAMIC RANGE; ELECTRODE CONFIGURATIONS; MECHANICAL ROTATION; PARALLEL-PLATE ACTUATORS; PARALLEL-PLATE ELECTROSTATIC ACTUATORS; SOLID MODEL; SOLID-STATE CIRCUITS; TORQUE MAGNIFICATION;

ELECTROSTATIC ACTUATORS;

EID: 4344688314     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215328     Document Type: Conference Paper

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