Microelectromechanical deformable mirrors

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 83-89

  Bifano, Thomas G ^a  

^a Boston University   (United States)

Author keywords

Adaptive optics; Microelectromechanical devices; Mirrors; Optical phase conjugation

Indexed keywords

ABERRATIONS; ACTUATORS; ADAPTIVE OPTICS; ELECTROSTATIC DEVICES; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL PHASE CONJUGATION; POLYCRYSTALLINE MATERIALS; SILICON; SURFACE TOPOGRAPHY; THIN FILMS;

DEFORMABLE MIRRORS;

MIRRORS;

EID: 0032653744     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748109     Document Type: Article

References (7)

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