Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer

Optics Letters

Volumn 29, Issue 11, 2004, Pages 1182-1184

  Keeler, Bianca E N ^a   Carr, Dustin W ^a   Sullivan, John P ^a   Friedmann, Thomas A ^a   Wendt, Joel R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL CONTACT; GRATING BEAMS; PHOTORECEIVERS; VACUUM CHAMBERS;

ACCELEROMETERS; DEHYDRATION; DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; LIGHT SOURCES; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL SYSTEMS; SENSORS; SIGNAL INTERFERENCE; TRANSDUCERS;

MICROELECTROMECHANICAL DEVICES;

EID: 2942597964     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.29.001182     Document Type: Article

References (8)

1. R. L. Waters and M. E. Aklufi, Appl. Phys. Lett. 81, 3320 (2002).
2. R. B. Apte, F. S. A. Sandejas, W. C. Banyai, and D. M. Bloom, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Transducer Research Foundation, Cleveland, Ohio, 1994), p. 1.
3. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, Opt. Lett. 17, 688 (1992).
4. D. W. Carr, J. P. Sullivan, and T. A. Friedmann, Opt. Lett. 28, 1636 (2003).
5. J. P. Sullivan, T. A. Friedmann, M. P. de Boer, D. A. LaVan, R. J. Hohlfelder, C. I. H. Ashby, M. T. Dugger, M. Mitchell, R. G. Dunn, and A. J. Magerkurth, Mater. Res. Soc. Symp. Proc. 657, EE711 (2001).
6. J. P. Sullivan, T. A. Friedmann, and K. Hjort, MRS Bull. 26, 309 (2001).
7. A. A. Shabana, Vibration of Discrete and Continuous Systems (Springer, New York, 1997).
8. C. H. Liu and T. W. Kenny, J. Microelectromech. Syst. 10, 425 (2001).