Optical detection of quasi-static actuation of nanoelectromechanical systems

Applied Physics Letters

Volumn 83, Issue 12, 2003, Pages 2420-2422

  Meyer, Christine ^a   Lorenz, Heribert ^a   Karrai, Khaled ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; HARMONIC ANALYSIS; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; SILICON;

OPTICAL DETECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0142121662     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1608491     Document Type: Article

References (18)

1. A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm, and S. Chu, Opt. Lett. 11, 288 (1986).
2. D. M. Eigler and E. K. Schweizer, Nature (London) 344, 524 (1990).
3. P. H. Beton, A. W. Dunn, and P. Moriarty, Appl. Phys. Lett. 67, 1075 (1995).
4. T. Junno, S.-B. Carlsson, H. Xu, L. Montelius, and L. Samuelson, Appl. Phys. Lett. 72, 548 (1998).
5. P. Kim and C. M. Lieber, Science 286, 2148 (1999).
6. S. Akita, Y. Nakayama, S. Mizooka, Y. Takano, T. Okawa, Y. Miyatake, S. Yamanaka, M. Tsuji, and T. Nosaka, Appl. Phys. Lett. 79, 1691 (2001).
7. P. Bøggild, T. M. Hansen, C. Tanasa, and F. Grey, Nanotechnology 12, 331 (2001).
8. D. W. Carr, L. Sekaric, and H. G. Craighead, J. Vac. Sci. Technol. B 16, 3821 (1998).
9. D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 75, 920 (1999).
10. J. F. Vignola, X. Liu, S. F. Morse, B. H. Houston, J. A. Bucaro, M. H. Marcus, D. M. Photiadis, and L. Sekaric, Rev. Sci. Instrum. 73, 3584 (2002).
11. A. Erbe, C. Weiss, W. Zwerger, and R. H. Blick, Phys. Rev. Lett. 87, 096106 (2001).
12. D. V. Scheible, A. Erbe, R. H. Blick, and G. Corso, Appl. Phys. Lett. 81, 10 (2002).
13. K. L. Ekinci, Y. T. Yang, X. M. H. Huang, and M. L. Roukes, Appl. Phys. Lett. 81, 2253 (2002).
14. E. Buks and M. L. Roukes, Phys. Rev. B 63, 033402 (2001).
15. M. Wendel, H. Lorenz, and J. P. Kotthaus, Appl. Phys. Lett. 67, 3732 (1995).
16. A. Tilke, L. Pescini, H. Lorenz, and R. H. Blick, Nanotechnology 13, 491 (2002).
17. L. Pescini et al., Adv. Mater. (Weinheim, Ger.) 13, 1780 (2001).
18. C. Meyer, H. Lorenz, and K. Karrai, Proceedings of IEEE 2003 Third Conference on Nanotechnology, IEEE-NANO 2003 (in press).