SCOPUS 정보 검색 플랫폼

Modelling and Simulation in Materials Science and Engineering

Volumn 14, Issue 4, 2006, Pages 607-615

Effects of stress and temperature gradients on the evolution of void in metal interconnects driven by electric current and mechanical stress

(3) Wang, Hua a Li, Zhonghua a Sun, Jun b

a SHANGHAI JIAO TONG UNIVERSITY (China)

b XI'AN JIAOTONG UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; COMPUTER SIMULATION; CRYSTAL DEFECTS; ELECTRIC CURRENTS; ELECTROMIGRATION; INTERDIFFUSION (SOLIDS);

MECHANICAL STRESS; STRESS GRADIENT; TEMPERATURE GRADIENT;

STRESS ANALYSIS;

EID: 33744751144 PISSN: 09650393 EISSN: 1361651X Source Type: Journal
DOI: 10.1088/0965-0393/14/4/005 Document Type: Article

Times cited : (24)

References (58)

1
- 0000802610
- 10.1063/1.354480 0021-8979
- Bower A and Freund L 1993 J. Appl. Phys. 74 3855-67
- (1993) J. Appl. Phys. , vol.74 , Issue.6 , pp. 3855-3867
- Bower, A.¹ Freund, L.²

2
- 0001411134
- 10.1063/1.347457 0021-8979
- Korhonen M, Paszkiet C and Li C Y 1991 J. Appl. Phys. 69 8083-91
- (1991) J. Appl. Phys. , vol.69 , Issue.12 , pp. 8083-8091
- Korhonen, M.¹ Paszkiet, C.² Li, C.Y.³

3
- 0028491015
- 10.1063/1.357734 0021-8979
- Arzt E, Kraft O, Nix W D and Sanchez J E Jr 1994 J. Appl. Phys. 76 1563-71
- (1994) J. Appl. Phys. , vol.76 , Issue.3 , pp. 1563-1571
- Arzt, E.¹ Kraft, O.² Nix, W.D.³ Sanchez, J.E.⁴

4
- 0031117638
- 10.1016/S1359-6454(96)00231-5 1359-6454
- Kraft O and Arzt E 1997 Acta Mater. 45 1599-611
- (1997) Acta Mater. , vol.45 , Issue.4 , pp. 1599-1611
- Kraft, O.¹ Arzt, E.²

5
- 0027915049
- 0272-9172
- Kraft O, Bader S, Sanchez J E Jr and Arzt E 1993 Mater. Res. Soc. Symp. Proc. 309 199-204
- (1993) Mater. Res. Soc. Symp. Proc. , vol.309 , pp. 199-204
- Kraft, O.¹ Bader, S.² Sanchez, J.E.³ Arzt, E.⁴

6
- 36449001427
- 10.1063/1.108284 0003-6951
- Rose J H 1992 Appl. Phys. Lett. 61 2170-2
- (1992) Appl. Phys. Lett. , vol.61 , Issue.18 , pp. 2170-2172
- Rose, J.H.¹

7
- 0004852018
- 10.1063/1.351484 0021-8979
- Sanchez J E Jr, McKnelly L T and Morris J W 1992 J. Appl. Phys. 72 3201-3
- (1992) J. Appl. Phys. , vol.72 , Issue.7 , pp. 3201-3203
- Sanchez, J.E.¹ McKnelly, L.T.² Morris, J.W.³

8
- 0027915009
- 0272-9172
- Joo Y C and Thompson C V 1993 Mater. Res. Soc. Symp. Proc. 309 351-6
- (1993) Mater. Res. Soc. Symp. Proc. , vol.309 , pp. 351-356
- Joo, Y.C.¹ Thompson, C.V.²

9
- 0026142093
- 0884-2914
- Arzt E and Nix W D 1991 J. Mater. Res. 6 731-6
- (1991) J. Mater. Res. , vol.6 , Issue.4 , pp. 731-736
- Arzt, E.¹ Nix, W.D.²

10
- 0026813885
- 10.1016/0956-7151(92)90305-X 0956-7151
- Kirchheim R 1992 Acta Metall. Mater. 40 309-23
- (1992) Acta Metall. Mater. , vol.40 , Issue.2 , pp. 309-323
- Kirchheim, R.¹

11
- 0012679538
- Electromigration failure
- 10.1063/1.347529 0021-8979
- Lloyd J R 1991 Electromigration failure J. Appl. Phys. 69 7601-4
- (1991) J. Appl. Phys. , vol.69 , Issue.11 , pp. 7601-7604
- Lloyd, J.R.¹

12
- 0038035318
- 10.1063/1.354073 0021-8979
- Korhonen M A, Børgesen P, Tu K N and Li C-Y 1993 J. Appl. Phys. 73 3790-9
- (1993) J. Appl. Phys. , vol.73 , Issue.8 , pp. 3790-3799
- Korhonen, M.A.¹ Børgesen, P.² Tu, K.N.³ Li, C.-Y.⁴

13
- 0031235428
- 10.1016/S0022-5096(97)00013-6 0022-5096
- Xia L, Bower A F, Suo Z and Shih C F 1997 J. Mech. Phys. Solids 45 1473-93
- (1997) J. Mech. Phys. Solids , vol.45 , Issue.9 , pp. 1473-1493
- Xia, L.¹ Bower, A.F.² Suo, Z.³ Shih, C.F.⁴

14
- 0042316205
- 10.1063/1.107898 0003-6951
- Li C-Y, Børgesen P and Korhonen M A 1992 Appl. Phys. Lett. 61 411-3
- (1992) Appl. Phys. Lett. , vol.61 , Issue.4 , pp. 411-413
- Li, C.-Y.¹ Børgesen, P.² Korhonen, M.A.³

15
- 36448999181
- 10.1063/1.111750 0003-6951
- Suo Z, Wang W and Yang M 1994 Appl. Phys. Lett. 64 1944-6
- (1994) Appl. Phys. Lett. , vol.64 , Issue.15 , pp. 1944-1946
- Suo, Z.¹ Wang, W.² Yang, M.³

16
- 36449001091
- 10.1063/1.113903 0003-6951
- Kraft O and Arzt E 1995 Appl. Phys. Lett. 66 2063-5
- (1995) Appl. Phys. Lett. , vol.66 , Issue.16 , pp. 2063-2065
- Kraft, O.¹ Arzt, E.²

17
- 36449002417
- 10.1063/1.107980 0003-6951
- Sanchez J E, Kraft O and Arzt E 1992 Appl. Phys. Lett. 61 3121-3
- (1992) Appl. Phys. Lett. , vol.61 , Issue.26 , pp. 3121-3123
- Sanchez, J.E.¹ Kraft, O.² Arzt, E.³

18
- 36449001427
- 10.1063/1.108284 0003-6951
- Hose J H 1992 Appl. Phys. Lett. 61 2170-2
- (1992) Appl. Phys. Lett. , vol.61 , Issue.18 , pp. 2170-2172
- Hose, J.H.¹

19
- 0032500401
- 10.1016/S0039-6028(98)00565-2 0039-6028
- Gungor M R and Maroudas D 1998 Surf. Sci. 415 L1055-60
- (1998) Surf. Sci. , vol.415 , Issue.3
- Gungor, M.R.¹ Maroudas, D.²

20
- 12244302229
- 10.1016/j.susc.2004.11.011 0039-6028
- Cho J S, Gungor M R and Maroudas D 2005 Surf. Sci. 575 L41-50
- (2005) Surf. Sci. , vol.575 , Issue.1-2
- Cho, J.S.¹ Gungor, M.R.² Maroudas, D.³

21
- 0000191007
- 10.1063/1.121663 0003-6951
- Gungor M R and Maroudas D 1998 Appl. Phys. Lett. 72 3452-5
- (1998) Appl. Phys. Lett. , vol.72 , Issue.26 , pp. 3452-3455
- Gungor, M.R.¹ Maroudas, D.²

22
- 0001761870
- 10.1103/PhysRevB.59.11037 0163-1829 B
- Mahadevan M and Bradley R M 1999 Phys. Rev. B 59 11037-45
- (1999) Phys. Rev. , vol.59 , Issue.16 , pp. 11037-11045
- Mahadevan, M.¹ Bradley, R.M.²

23
- 0000293143
- 10.1063/1.371928 0021-8979
- Schimschak M and Krug J 2000 J. Appl. Phys. 87 695-703
- (2000) J. Appl. Phys. , vol.87 , Issue.2 , pp. 695-703
- Schimschak, M.¹ Krug, J.²

24
- 0001497702
- 10.1063/1.369656 0021-8979
- Fridline D and Bower A F 1999 J. Appl. Phys. 85 3168-74
- (1999) J. Appl. Phys. , vol.85 , Issue.6 , pp. 3168-3174
- Fridline, D.¹ Bower, A.F.²

25
- 7044274252
- 10.1063/1.1790037 0003-6951
- Cho J S, Gungor M R and Maroudas D 2004 Appl. Phys. Lett. 85 2214-6
- (2004) Appl. Phys. Lett. , vol.85 , Issue.12 , pp. 2214-2216
- Cho, J.S.¹ Gungor, M.R.² Maroudas, D.³

26
- 0035333784
- 10.1023/A:1011054731371 0376-9429
- Gungor M R and Maroudas D 2001 Int. J. Fract. 109 47-68
- (2001) Int. J. Fract. , vol.109 , Issue.1 , pp. 47-68
- Gungor, M.R.¹ Maroudas, D.²

27
- 0036531418
- 10.1016/S0927-0256(01)00229-4 0927-0256
- Maroudas D and Gungor M R 2002 Comput. Mater. Sci. 23 242-9
- (2002) Comput. Mater. Sci. , vol.23 , Issue.1-4 , pp. 242-249
- Maroudas, D.¹ Gungor, M.R.²

28
- 0033558387
- 10.1209/epl/i1999-00221-7 0295-5075
- Mahadevan M, Bradley R M and Debierre J M 1999 Europhys. Lett. 45 680-5
- (1999) Europhys. Lett. , vol.45 , Issue.6 , pp. 680-685
- Mahadevan, M.¹ Bradley, R.M.² Debierre, J.M.³

29
- 0000141460
- 10.1103/PhysRevLett.78.278 0031-9007
- Schimschak M and Krug J 1997 Phys. Rev. Lett. 78 278-81
- (1997) Phys. Rev. Lett. , vol.78 , Issue.2 , pp. 278-281
- Schimschak, M.¹ Krug, J.²

30
- 11744357312
- 10.1103/PhysRevLett.80.1674 0031-9007
- Schimschak M and Krug J 1998 Phys. Rev. Lett. 80 1674-7
- (1998) Phys. Rev. Lett. , vol.80 , Issue.8 , pp. 1674-1677
- Schimschak, M.¹ Krug, J.²

31
- 33845400575
- 10.1063/1.1428097 0021-8979
- Fridline D and Bower A F 2002 J. Appl. Phys. 91 2380-90
- (2002) J. Appl. Phys. , vol.91 , Issue.4 , pp. 2380-2390
- Fridline, D.¹ Bower, A.F.²

32
- 0032659246
- 10.1016/S0039-6028(99)00655-X 0039-6028
- Gungor M R and Maroudas D 1999 Surf. Sci. 432 L604-10
- (1999) Surf. Sci. , vol.432 , Issue.3
- Gungor, M.R.¹ Maroudas, D.²

33
- 0001740171
- 10.1016/S0039-6028(00)00616-6 0039-6028
- Gungor M R and Maroudas D 2000 Surf. Sci. 461 L550-6
- (2000) Surf. Sci. , vol.461 , Issue.1-3
- Gungor, M.R.¹ Maroudas, D.²

34
- 0000647987
- 10.1063/1.122913 0003-6951
- Gungor M R and Maroudas D 1998 Appl. Phys. Lett. 73 3848-51
- (1998) Appl. Phys. Lett. , vol.73 , Issue.26 , pp. 3848-3851
- Gungor, M.R.¹ Maroudas, D.²

35
- 0001336786
- 10.1063/1.372082 0021-8979
- Bhate D N, Kumar A and Bower A F 2000 J. Appl. Phys. 87 1712-21
- (2000) J. Appl. Phys. , vol.87 , Issue.4 , pp. 1712-1721
- Bhate, D.N.¹ Kumar, A.² Bower, A.F.³

36
- 0000580606
- 10.1063/1.369532 0021-8979
- Gungor MR and Maroudas D 1999 J. Appl. Phys. 85 2233-46
- (1999) J. Appl. Phys. , vol.85 , Issue.4 , pp. 2233-2246
- Gungor, M.R.¹ Maroudas, D.²

37
- 0032066505
- 10.1046/j.1460-2695.1998.00057.x 8756-758X
- Bower A and Craft D 1998 Fatigure Fract. Eng. Mater. Struct. 21 611-30
- (1998) Fatigure Fract. Eng. Mater. Struct. , vol.21 , Issue.5 , pp. 611-630
- Bower, A.¹ Craft, D.²

38
- 0000069127
- 10.1007/BF01198662 0928-1045
- Marudas D, Enmark M and Leibig C 1995 J. Comput. Aid. Mater. Des. 2 231-58
- (1995) J. Comput. Aid. Mater. Des. , vol.2 , Issue.3 , pp. 231-258
- Marudas, D.¹ Enmark, M.² Leibig, C.³

39
- 0037400842
- 10.1016/S0022-5096(02)00039-X 0022-5096
- Wang H and Li Z 2003 J. Mech. Phys. Solids. 51 964-76
- (2003) J. Mech. Phys. Solids. , vol.51 , Issue.5 , pp. 961-976
- Wang, H.¹ Li, Z.²

40
- 2942677135
- 10.1063/1.1690862 0021-8979
- Wang H and Li Z 2004 J. Appl. Phys. 95 6025-32
- (2004) J. Appl. Phys. , vol.95 , Issue.11 , pp. 6025-6032
- Wang, H.¹ Li, Z.²

41
- 3543133522
- 10.1023/B:JMSC.0000026945.89767.25 0022-2461
- Wang H and Li Z 2004 J. Mater. Sci. 39 3425-32
- (2004) J. Mater. Sci. , vol.39 , Issue.10 , pp. 3425-3432
- Wang, H.¹ Li, Z.²

42
- 0043198325
- 1073-5623
- Wang H and Li Z 2003 Metall. Mater. Trans. 34A 1493-501
- (2003) Metall. Mater. Trans. , vol.34 , Issue.7 , pp. 1493-1501
- Wang, H.¹ Li, Z.²

43
- 0028546607
- 10.1016/0022-5096(94)90066-3 0022-5096
- Sun B, Suo Z and Evans A G 1994 J. Mech. Phys. Solids 42 1653-77
- (1994) J. Mech. Phys. Solids , vol.42 , Issue.11 , pp. 1653-1677
- Sun, B.¹ Suo, Z.² Evans, A.G.³

44
- 0016940795
- 10.1063/1.322842 0021-8979
- Blech I A 1976 J. Appl. Phys. 47 1203-8
- (1976) J. Appl. Phys. , vol.47 , Issue.4 , pp. 1203-1208
- Blech, I.A.¹

45
- 36749115512
- 10.1063/1.89024 0003-6951
- Blech I A and Herring C 1976 Appl. Phys. Lett. 29 131-3
- (1976) Appl. Phys. Lett. , vol.29 , Issue.3 , pp. 131-133
- Blech, I.A.¹ Herring, C.²

46
- 0033225102
- 10.1016/S0167-9317(99)00429-3 0167-9317
- Lloyd J R 1999 Microeletron. Eng. 49 51-64
- (1999) Microeletron. Eng. , vol.49 , Issue.1-2 , pp. 51-64
- Lloyd, J.R.¹

47
- 0011735428
- 10.1016/S1359-6454(97)00446-1 1359-6454
- Blech I A 1998 Acta Mater. 46 3717-23
- (1998) Acta Mater. , vol.46 , Issue.11 , pp. 3717-3723
- Blech, I.A.¹

48
- 0000541904
- 0268-1242 002
- Lloyd J R 1997 Semicond. Sci. Technol. 12 1177-85
- (1997) Semicond. Sci. Technol. , vol.12 , Issue.10 , pp. 1177-1185
- Lloyd, J.R.¹

49
- 0000594331
- 10.1016/S1359-6454(98)00098-6 1359-6454
- Suo Z 1998 Acta Mater. 46 3725-32
- (1998) Acta Mater. , vol.46 , Issue.11 , pp. 3725-3732
- Suo, Z.¹

50
- 0034315310
- 10.1023/A:1004852912392 0022-2461
- Ru C Q 2000 J. Mater. Sci. 35 5575-9
- (2000) J. Mater. Sci. , vol.35 , Issue.22 , pp. 5575-5579
- Ru, C.Q.¹

51
- 0037307464
- 1073-5623
- Huang P, Li Z, Sun J and Gao H 2003 Metall. Mater. Trans. 34A 277-85
- (2003) Metall. Mater. Trans. , vol.34 , Issue.2 , pp. 277-285
- Huang, P.¹ Li, Z.² Sun, J.³ Gao, H.⁴

52
- 0035338839
- 0965-0393 306
- Huang P and Li Z 2001 Modelling Simul. Mater. Sci. Eng. 9 193-206
- (2001) Modelling Simul. Mater. Sci. Eng. , vol.9 , Issue.3 , pp. 193-206
- Huang, P.¹ Li, Z.²

53
- 0035981443
- Huang P, Li Z and Sun J 2002 Metall. Mater. Trans. 33A 1121-8
- (2002) Metall. Mater. Trans. , vol.33 , pp. 1121-1128
- Huang, P.¹ Li, Z.² Sun, J.³

54
- 0000362877
- 10.1063/1.361166 0021-8979
- Wang W, Suo Z and Hao T H 1996 J. Appl. Phys. 79 2394-403
- (1996) J. Appl. Phys. , vol.79 , Issue.5 , pp. 2394-2403
- Wang, W.¹ Suo, Z.² Hao, T.H.³

55
- 0028714256
- 0272-9172
- Wang W, Suo Z and Hao T H 1994 Mater. Res. Soc. Symp. Proc. 338 415-20
- (1994) Mater. Res. Soc. Symp. Proc. , vol.338 , pp. 415-420
- Wang, W.¹ Suo, Z.² Hao, T.H.³

56
- 0041766644
- 10.1063/1.1585119 0021-8979
- Gan C L, Thompson C V, Pey K L and Choi W K 2003 J. Appl. Phys. 94 1222-8
- (2003) J. Appl. Phys. , vol.94 , Issue.2 , pp. 1222-1228
- Gan, C.L.¹ Thompson, C.V.² Pey, K.L.³ Choi, W.K.⁴

57
- 84859015421
- Suo Z 2003 Compr. Struct. Integr. 8 265-324
- (2003) Compr. Struct. Integr. , vol.8 , pp. 265-324
- Suo, Z.¹

58
- 0036048355
- Chiang T Y, Shieh B and Saraswat K C 2002 Symp. VLSI Technol. 38-41 ISSU 2002
- (2002) Symp. VLSI Technol. , pp. 38-41
- Chiang, T.Y.¹ Shieh, B.² Saraswat, K.C.³

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