Stability of surface tension self-assembled 3D MOEMS

Sensors and Actuators, A: Physical

Volumn 127, Issue 2, 2006, Pages 381-391

  Hong, Y K ^a   Syms, R R A ^a,b,c,d  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b Department of Microsystems Technology ^*  (United Kingdom)

^c Institution of Electrical Engineers IEE   (United Kingdom)

^d Institute of Physics   (United Kingdom)

Author keywords

Dynamic stability; MOEMS; Self assembly; Surface tension; Thermal stability

Indexed keywords

DYNAMIC MECHANICAL STABILITY MEASUREMENT; DYNAMIC STABILITY; MOEMS; SELF-ASSEMBLY;

ELASTIC MODULI; HINGES; MIRRORS; PHOTORESISTORS; SELF ASSEMBLY; THERMAL CYCLING; THERMAL EXPANSION; THERMODYNAMIC STABILITY;

SURFACE TENSION;

EID: 33644906662     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.013     Document Type: Article

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