Robust micro conveyer realized by arrayed polyimide joint actuators

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 337-349

  Ebefors, Thorbjörn ^a   Mattsson, Johan Ulfstedt ^a   Kälvesten, Edvard ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CONVEYORS; MICROACTUATORS; POLYIMIDES; SILICON; THERMAL EXPANSION;

MICRO-CONVEYER;

MICROELECTROMECHANICAL DEVICES;

EID: 0034276117     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/307     Document Type: Article

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