Monolithic high aspect ratio two-axis optical scanners in SOI

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 255-258

  Milanović, Veljko ^a   Matus, Gabriel A ^a   Cheng, Thomas ^b   Cagdaser, Baris ^b  

^a Adriatic Research Institute   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC TRANSFORMERS; NATURAL FREQUENCIES; SCANNING; SILICON ON INSULATOR TECHNOLOGY;

MICROMIRRORS; OPTICAL BEAM DEFLECTION; OPTICAL SCANNERS; ROTATORS;

OPTICAL DEVICES;

EID: 0037480709     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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