SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2002, Pages 122-129

Pin-joint design effect on the reliability of a polysilicon microengine

(4) Tanner, Danelle M a Walraven, Jeremy A a Mani, Seethambal S a Swanson, Scot E a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

MEMS Reliability; MEMS Wear; MicroElectroMechanical System

Indexed keywords

ADHESION; POLYSILICON; PROTECTIVE COATINGS; RELIABILITY; SELF ASSEMBLY; STRESS ANALYSIS; SUPERCRITICAL FLUIDS;

MICROENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036085611 PISSN: 00999512 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (7)

References (23)

1
- 0025698150
- In situ friction and wear measurements in integrated polysilicon mechanisms
- (1990) Sensors and Actuators , vol.A21-A23 , pp. 184-188
- Gabriel, K.J.¹ Behi, F.² Mahadevan, R.³

2
- 0024032417
- Integrated fabrication of polysilicon mechanisms
- (1999) IEEE Trans. Electron Devices , vol.ED-35 , pp. 719-723
- Mehregany, M.¹ Gabriel, K.J.² Trimmer, W.S.N.³

3
- 0031681013
- The effect of frequency on the life-time of a surface micromachined microengine driving a load
- Reno, NV
- (1998) IEEE International Reliability Physics Symposium , pp. 26-35
- Tanner, D.M.¹ Miller, W.M.² Eaton, W.P.³ Irwin, L.W.⁴ Peterson, K.A.⁵ Dugger, M.T.⁶ Senft, D.C.⁷ Smith, N.F.⁸ Tangyunyong, P.⁹ Miller, S.L.¹⁰

4
- 0032293023
- Linkage design effect on the reliability of surface micromachined microengines driving a load
- Proceedings of SPIE , vol.3512 , pp. 215-226
- Tanner, D.M.¹ Peterson, K.A.² Irwin, L.W.³ Tangyunyong, P.⁴ Miller, W.M.⁵ Eaton, W.P.⁶ Smith, N.F.⁷ Rodgers, M.S.⁸

5
- 0029296809
- Surface micromachined microengine
- (1995) Sensors and Actuators A , vol.48 , pp. 203-214
- Garcia, E.J.¹ Sniegowski, J.J.²

6
- 0032687067
- Frequency dependence of the lifetime of a surface micromachined microengine driving a load
- (1999) Microelectronics Reliability Journal , vol.39 , pp. 401-414
- Tanner, D.M.¹ Miller, W.M.² Peterson, K.A.³ Dugger, M.T.⁴ Eaton, W.P.⁵ Irwin, L.W.⁶ Senft, D.C.⁷ Smith, N.F.⁸ Tangyunyong, P.⁹ Miller, S.L.¹⁰

7
- 0033352363
- Failure analysis of worn surface micromachined microengines
- (1999) Proceedings of SPIE , vol.3880 , pp. 30-39
- Walraven, J.A.¹ Headley, T.J.² Campbell, A.N.³ Tanner, D.M.⁴

8
- 0033741693
- Effect of W coating on microengine performance
- (2000) Proceedings of IRPS , pp. 146-151
- Mani, S.S.¹ Fleming, J.G.² Walraven, J.A.³ Sniegowski, J.J.⁴ De Boer, M.P.⁵ Irwin, L.W.⁶ Tanner, D.M.⁷ LaVan, D.A.⁸ Dugger, M.T.⁹ Jakubczak, J.¹⁰ Miller, W.M.¹¹

9
- 3943070464
- Critical review: Adhesion in surface micromechanic structures
- Jan./Feb.
- (1997) Journal Vac. Sci. Technol. , vol.B 15 , Issue.1 , pp. 1-20
- Maboudian, R.¹ Howe, R.T.²

10
- 0001064718
- Stiction reduction processes for surface micromachines
- (1997) Tribology Letters , vol.3 , pp. 215-221
- Maboudian, R.¹ Howe, R.T.²

11
- 0026986369
- The effect of release-etch processing on surface microstructure stiction
- Hilton Head, SC
- (1992) Proceedings of the IEEE Solid-State Sensor and Actuator Work shop , pp. 202-207
- Alley, R.L.¹ Howe, R.T.² Komvopoulos, K.³

12
- 0031648044
- Comparative evaluation of drying techniques for surface micromachining
- (1998) Sensors and Actuators , vol.A64 , pp. 17-26
- Kim, C.J.¹ Kim, J.Y.² Sridharan, B.³

13
- 0030384976
- Performance tradeoffs for a surface micromachined microengine
- Austin, October. 14-15
- (1996) Proceedings of SPIE Micromachined Devices and Components II , vol.2882 , pp. 182-191
- Miller, S.L.¹ Sniegowski, J.J.² LaVigne, G.³ McWhorter, P.J.⁴

14
- 0005969482
- copyright
- (1998) Super μDriver V1.0
- Smith, N.F.¹ Tanner, D.M.² LaVigne, G.F.³ Miller, S.L.⁴ Eaton, W.P.⁵ Irwin, L.W.⁶

15
- 0002744537
- MEMS reliability: Infrastructure, test structures, experiments, and failure modes
- January, Download from
- (2000) Sandia Report , vol.SAND2000-0091 , pp. 155-157
- Tanner, D.M.¹

16
- 0032302210
- Characterization techniques for surface-micromachined microengines
- Santa Clara, CA
- (1998) SPIE's 1998 Symposium on Micromachining and Micro fabrication , vol.3514 , pp. 171-178
- Eaton, W.P.¹ Smith, N.F.² Irwin, L.³ Tanner, D.M.⁴ Allen, J.J.⁵ Miller, S.L.⁶ Miller, W.M.⁷

17
- 0033338499
- Development of characterization tools for reliability testing of MicroElectroMechanical system actuators
- (1999) Proc. of SPIE , vol.3880 , pp. 156-164
- Smith, N.F.¹ Eaton, W.P.² Tanner, D.M.³ Allen, J.J.⁴

18
- 0037658047
- Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor
- (2000) Tribology Letters , vol.9 , Issue.3-4 , pp. 199-209
- Patton, S.T.¹ Cowna, W.D.² Eapen, K.C.³ Zabinski, J.S.⁴

19
- 0002528131
- Lubrication of polysilicon micromechanisms with self-assembled monolayers
- Hilton Head, SC, USA
- (1998) Proc. IEEE Solid-State Sensor Actuator Workshop , pp. 156-161
- Srinivasan, U.¹ Foster, J.D.² Habib, U.³ Howe, R.T.⁴ Maboudian, R.⁵ Senft, S.C.⁶ Dugger, M.T.⁷

20
- 0032095227
- How third-body processes affect friction and wear
- (1998) MRS Bulletin , vol.23 , Issue.6
- Singer, I.L.¹

21
- 0003946537
- John Wiley & Sons, Inc.
- (1995) Friction and Wear of Materials , pp. 143-190
- Rabinowicz, E.¹

22
- 0036165397
- A mechanism of high friction in dry sliding bearings
- (2002) Wear , vol.252 , pp. 1-8
- Mosleh, M.¹ Saka, N.² Suh, N.P.³

23
- 0003946537
- John Wiley & Sons, Inc.
- (1995) Friction and Wear of Materials , pp. 180
- Rabinowicz, E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.