A solder self-assembled torsional micromirror array

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 215-218

  McCarthy, Brian ^a   Bright, Victor M ^a   Neff, John A ^a  

^a University of Colorado at Boulder   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; HIGH POWER LASERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; REFLECTIVE COATINGS;

MICROMIRROR ARRAY; SOLDER SELF ASSEMBLY;

MIRRORS;

EID: 0037480721     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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