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Volumn 44, Issue , 1998, Pages 56-65
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Designing and operating electrostatically driven microengines
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
MICROELECTROMECHANICAL DEVICES;
POWER TRANSMISSION;
ELECTROSTATICALLY DRIVEN MICROENGINES;
ENGINES;
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EID: 0031677463
PISSN: 02277576
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (18)
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References (14)
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