Femtosecond laser micromachining of grooves in indium phosphide

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 3, 2004, Pages 521-529

  Borowiec, A ^a,b   Haugen, H K ^a  

^a MCMASTER UNIVERSITY   (Canada)

^b MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CUTTING DIRECTION; FEED RATE; LASER PARAMETERS;

CHARGE COUPLED DEVICES; GEOMETRY; LASER BEAM EFFECTS; LIGHT POLARIZATION; MICROMACHINING; PHASE TRANSITIONS; SAMPLING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 3042845410     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-003-2377-0     Document Type: Article

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52. Note that in our first preliminary work we reported that the data for groove depth versus pulse energy could be fit to a straight line over a substantial fluence range. See: A. Borowiec, H.K. Haugen, CLEO/QELS 2002 Technical Digest, paper CTuK37, p. 220, Long Beach, USA, 2002. However with much improved statistics and by including data for low pulse energies, it was found that the results were much better described by the approach outlined in this paper.