Laser processing of sapphire with picosecond and sub-picosecond pulses

Applied Surface Science

Volumn 120, Issue 1-2, 1997, Pages 65-80

  Ashkenasi, D ^a   Rosenfeld, A ^a   Varel, H ^a   Wahmer M ^a   Campbell, E E B ^a  

^a MAX BORN INSTITUT   (Germany)

Author keywords

Sapphire; Ultrashort pulse laser ablation

Indexed keywords

ALUMINUM COMPOUNDS; LASER ABLATION; LASER PULSES; LIGHT MODULATION; LIGHT POLARIZATION; MICROSTRUCTURE; SAPPHIRE;

ABLATION PHASES; LASER WAVELENGTH; RIPPLE MODULATION DEPTH;

PULSED LASER APPLICATIONS;

EID: 0031272641     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00218-3     Document Type: Article

References (30)

1. A.C. Tam, J.L. Brand, D.C. Cheng, W. Zapka, Appl. Phys. Lett. 55 (20) (1994) 2045.
2. R.M. Wood, in: Laser Damage in Optical Materials, Adam Hilger Ser. Opt. Optoelectron, Adam Hilger, Bristol, 1986.
3. E. Matthias, R. Dreyfus, in: P. Hess (Ed.), Topics in Current Physics, Vol. 47, Springer Verlag, Berlin/Heidelberg, 1989, p. 89.
4. P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou, Opt. Comm. (1995) 114.
5. R. Kelly, J.J. Cuomo, P.A. Leary, J.E. Rothenberg, B.E. Braren, C.F. Aliotta, Nucl. Instr. Meth. Phys. Res. B 9 (1985) 329.
6. D. Bäuerle, Laser Processing and Chemistry, Springer Verlag, 1996.
7. R. Kelly, A. Miotello, Nucl. Instr. Meth. Phys. Res. B, in press.
8. B.C. Stuart, M.D. Feit, S. Herman, A.M. Rubenchik, B.W. Shore, M.D. Perry, J. Opt. Soc. Am. B 13 (2) (1996) 459.
9. J.E. Rothenberg, R. Kelly, Nucl. Instr. Meth. Phys. Res. B 1 (1984) 291.
10. R.W. Dreyfus, R. Kelly, R.E. Walkup, Appl. Phys. Lett. 49 (21) (1986) 1478.
11. R.W. Dreyfus, F.A. McDonald, R.J. von Gutfeld, Appl. Phys. Lett. 50 (21) (1987) 1491.
12. J.E. Rothenburg, G. Koren, Appl. Phys. Lett. 44 (1984) 664.
13. R.E. Walkup, J.M. Jasinski, R.W. Dreyfus, Appl. Phys. Lett. 48 (1986) 1690.
14. M.A. Schildbach, A.V. Hamza, Phys. Rev. B 45 (11) (1992) 6197.
15. J.L. Brand, A.C. Tam, Appl. Phys. Lett. 56 (1990) 883.
16. E. Kotomin, private communication, 1997.
17. H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, E.E.B. Campbell, Appl. Phys. A 62 (1996) 293.
18. D. Ashkenasi, H. Varel, A. Rosenfeld, F. Noack, E.E.B. Campbell, Appl. Phys. A 63 (1996) 103.
19. D. Ashkenasi, H. Varel, A. Rosenfeld, E.E.B. Campbell, Nucl. Instr. Meth. Phys. Res. B 122 (1997) 359.
20. H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, E.E.B. Campbell, Appl. Phys. A (1997), accepted.
21. G. Petite, P. Daguzan, S. Guizard, P. Martin, Nucl. Instr. Meth. Phys. Res. B 107 (1996) 97.
22. R. Kelly, A. Miotello, Appl. Surf. Sci. 96-98 (1996) 205.
23. A. Miotello, R. Kelly, Appl. Phys. Lett. 67 (1995) 3535.
24. M. Chase et al., Thermochem. Tables (JANAF), 3rd ed., J. Phys. Chem. Ref. Data 14 (Suppl. 1) (1985).
25. M. Birnbaum, J. Appl. Phys. 36 (1965) 3688.
26. F. Keilmann, Phys. Rev. Lett. 51 (1983) 2097.
27. A.J. Pedraza, J.W. Park, H.M. Meyer III, D.N. Braski, J. Mater. Res. 9 (1994) 2251.
28. H. Callen, R.M. Josephs, J.A. Seitchek, B.F. Stein, Appl. Phys. Lett. 21 (1972) 366.
29. D. Ashkenasi, A. Rosenfeld, H. Varel, E.E.B. Campbell, OSA Tech. Dig. Ser. Vol. 11, Conf. Ed. CLEO '97, CTUR3 (1997) 161.
30. H. Varel, A. Rosenfeld, D. Ashkenasi, S. Henz, J. Herrmann, E.E.B. Campbell, OSA Tech. Dig. Ser., Vol. 11, Conf. Ed. CLEO '97, CThL4 (1997) 359.