|
Volumn 127-129, Issue , 1998, Pages 875-880
|
Femtosecond laser micro structuring of materials
b a a a a c |
Author keywords
Laser; Pulses; Silicon
|
Indexed keywords
CRYSTAL MICROSTRUCTURE;
FUSED SILICA;
INFRARED RADIATION;
LASER ABLATION;
LIGHT ABSORPTION;
MICROMACHINING;
MIRRORS;
SILICON;
SURFACE ROUGHNESS;
ULTRAFAST PHENOMENA;
ULTRAVIOLET RADIATION;
ABSORPTION COEFFICIENTS;
FEMTOSECOND LASER MICROSTRUCTURING;
MICROCHANNELS;
MICROCHEMICAL APPLICATIONS;
PULSED LASER APPLICATIONS;
|
EID: 0032069393
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(97)00760-5 Document Type: Article |
Times cited : (118)
|
References (14)
|