Laser-induced dry etching of integrated InP microlenses

Applied Physics A: Materials Science and Processing

Volumn 65, Issue 4-5, 1997, Pages 349-353

  Matz, R ^a   Weber, H ^a,c   Weimann, G ^b,d  

^a SIEMENS AG   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^c SIEMENS AG ÖSTERREICH   (Austria)

^d FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; LASER PULSES; OPTICAL FIBER COUPLING; OPTICAL FIBERS; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR LASERS; SURFACE STRUCTURE;

INTEGRATED MICROLENSES;

OPTICAL INSTRUMENT LENSES;

EID: 0031251638     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050590     Document Type: Article

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