Micro- and sub-micromachining of type IIa single crystal diamond using a Ti:Sapphire femtosecond laser

Journal of Manufacturing Science and Engineering

Volumn 124, Issue 2, 2002, Pages 389-396

  Ramanathan, Diwakar ^a   Molian, Pal A ^a  

^a Iowa State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMONDS; LASERS; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; TITANIUM;

FEMTOSECOND LASERS;

MICROMACHINING;

EID: 0042192507     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1459083     Document Type: Article

References (18)

1. Prelas, M., Popovici, G., and Bigelow, L., eds., 1998, Handbook of Industrial Diamonds and Diamond Films, Marcel Dekker, Inc.
2. Bakon, A., and Szymanski, A., 1993, Practical Uses of Diamond, Ellis Horwood.
3. Dyer, H.B., 1967, "Physical and Mechanical Properties of Diamond," Proceedings of Industrial Diamond Conference I to VIII.
4. Pierson, H.O., 1993, Handbook of Carbon, Graphite, Diamond and Fullerenes, Noyes Publications.
5. Ralchenko, V.G., and Pimenov, S.M., 1998, Processing, Handbook of Industrial Diamonds and Diamond Films, Marcel Dekker Inc.
6. Shirk, M.D., and Molian, P.A., 1998, "A Review of Ultrashort Pulsed Laser Ablation of Materials," J. Laser Appl., 10(2), pp. 18-28.
7. Strickland, D., and Mourou, G., 1985, "Compression of Amplified Chirped Optical Pulses," Opt. Commun., 56, pp. 219-224.
8. Shirk, M.D., Molian, P.A., and Malshe, A.P., 1998, "Ultrashort Pulsed Laser Ablation of Diamond," J. Laser Appl., 10, pp. 64-70.
9. Windholz, R., and Molian, P.A., 1997, "Nanosecond Pulsed Excimer Laser Machining of CVD Diamond and HOPG Graphite, Part I: Experimental Study," J. Mater. Sci., 32, pp. 4295-4301.
10. Stuart, B.C., Feit, M.D., Herman, S., Rubenchik, A.M., Shore, B.W., and Perry, M.D., 1996, "Optical Ablation by High-Power Short-Pulse Lasers," Optical Society of America, 13(2), pp. 459-468.
11. Liu, X., and Mourou, G., 1997, "Ultrashort Laser Pulses Taclde Precision Machining," Laser Focus World, August, pp. 101-118.
12. Momma, C., Nolte, S., Chichkov, B., Alvensleben, F., and Tunnermann, A., 1997, "Precise Laser Ablation with Ultrashort Pulses," Appl. Surf. Sci., 109, pp. 15-19.
13. Zhu, X., Villeneuve, D.M., Yu Naumov, A., Nikumb, S., and Corkum, P.B., 1999, "Experimental Study of Drilling Sub-10 mm Holes in Thin Metal Foils With Femtosecond Pulses," Appl. Surf. Sci., 152, pp. 138-148.
14. Gudde, J., Hohlfeld, J., Muller, J.G., and Matthias, E., 1998, "Damage Threshold Dependence on ELectron-Photon Coupling in Au and Ni Films," Appl. Surf. Sci., 127-129, pp. 40-45.
15. Bonse, J., Rudolph, P., Kruger, J., Baudach, S., and Kautek, W., 2000, "Femtosecond Pulse Laser Processing of TiN on Silicon," Appl. Surf. Sci., 154-155, pp. 659-663.
16. Chichkov, B.N., Momma, C., Nolte, S., von Alvensleben, F., and Tunnermann, A., 1996, "Femtosecond, Picosecond and Nanosecond Ablation of Solids," Appl. Phys. A: Mater. Sci. Process., 63, pp. 109-115.
17. Aschcroft, N.W., and Mermin, N.D., 1976, Solid State Physics, Harcourt Brace College Publishers NY.
18. Papaconstatopoulos, D.A., 1986, Handbook of the Band Structure of Elemental Solids, p. 230, Plenum Press NY.