Femtosecond laser-induced formation of spikes on silicon

Applied Physics A: Materials Science and Processing

Volumn 70, Issue 4, 2000, Pages 383-385

  Her, T H ^a,c   Finlay, R J ^b,c   Wu, C ^c   Mazur, E ^c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b NORTEL NETWORKS   (Canada)

^c HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LASER ABLATION; LASER PULSES; MORPHOLOGY; SURFACES;

FEMTOSECOND LASER INDUCED FORMATION; LASER INDUCED CHEMICAL ETCHING; LASER POLARIZATION; SHARP CONICAL SPIKES;

SILICON;

EID: 0034171657     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051052     Document Type: Article

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