Selective ablation of AIN ceramic using femtosecond, nanosecond, and microsecond pulsed laser

Journal of Applied Physics

Volumn 89, Issue 5, 2001, Pages 2943-2949

  Hirayama, Yoichi ^a   Yabe, Hiroyuki ^a   Obara, Minoru ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001378937     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1342805     Document Type: Article

References (15)

1. H. Esrom, J-Y. Zhang, and A. J. Pedraza, Mater. Res. Soc. Symp. Proc. 236, 383 (1993).
2. H. K. Tonshoff, D. Hesse, and O. Gedrat, Proc. SPIE 1810, 572 (1992).
3. A. Tsetsekou, Th. Zambetakis, and C. J. Stournaras, Proc. SPIE 1810, 616 (1992).
4. H. Esrom, J.=Y. Zhang, and A. J. Pedraza, Mater. Res. Soc. Symp. Proc. 204, 457 (1992).
5. S. Cao and A. J. Pedraza, Mater. Res. Soc. Symp. Proc. 10, 54 (1995).
6. N. Monta, T. Watanabe, and Y. Yoshida, Appl. Phys. Lett. 54, 1974 (1989).
7. Thermochemical Properties of Inorganic Substances (Springer, New York, Berlin, 1973).
8. M. K. Kelly et al., Appl. Phys. Lett. 69, 1749 (1996).
9. H. Chen et al., Mater. Res. Soc. Symp. Proc, 482, 1015 (1998).
10. T. Akane, T. Sugioka, H. Ogino, H. Takai, and K. Midorikawa, Appl. Surf. Sci. 148, 133 (1999).
11. S. Nolle, C. Momma, H. Jacobs, A. Tunnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997).
12. K. Furosawa, K. Takahashi, H. Kumagai, K. Midorikawa, and M. Obara, Appl. Phys. A: Mater. Sci. Process 69, S359 (1999).
13. K. Furusawa, K. Takahashi, S.-H. Cho, H. Kumagai, K. Midorikawa, and M. Obara, J. Appl. Phys. 87, 1604 (2000).
14. J. Bonse, P. Rudolph, J. Kueger, S. Baudach, and W. Kautek, Appl. Surf. Sci. 154-155, 659 (2000).
15. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tuennermann, Appl. Phys. A: Mater. Sci. Process. 63, 109 (1996).