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Volumn 82, Issue 1-3, 2001, Pages 262-264
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Femtosecond laser machining of gallium nitride
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Author keywords
Femtosecond pulse laser; Gallium nitride; Laser ablation
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Indexed keywords
GALLIUM NITRIDE;
LASER ABLATION;
MACHINING;
PULSED LASER APPLICATIONS;
ULTRASHORT PULSE LASER ABLATION;
SEMICONDUCTING GALLIUM COMPOUNDS;
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EID: 0035933186
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(00)00790-X Document Type: Article |
Times cited : (36)
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References (9)
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