Nearly amorphous to epitaxial growth of aluminum nitride films

Diamond and Related Materials

Volumn 13, Issue 9, 2004, Pages 1603-1608

  Leung, T T ^a   Ong, C W ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Aluminum nitride films; Epitaxial growth; Reactive magnetron sputtering

Indexed keywords

ALUMINUM NITRIDE; CRYSTALLIZATION; EPITAXIAL GROWTH; FILM GROWTH; MAGNETRON SPUTTERING; PLATINUM; SILICON; SUBSTRATES;

EPITAXIAL STRUCTURES; LATTICE MATCHING; REACTIVE MAGNETRON SPUTTERING;

AMORPHOUS MATERIALS;

ALUMINUM NITRIDE;

EID: 3042615298     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.01.015     Document Type: Article

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