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Materials Science and Engineering B

Volumn 50, Issue 1-3, 1997, Pages 272-276

Synthesis of AlN by reactive sputtering

(3) Randriamora, F a Bruyere J C a Deneuville, A a

a CNRS (France)

Author keywords

AlN synthesis; Reactive sputtering

Indexed keywords

DIFFUSION IN SOLIDS; ENERGY GAP; LIGHT ABSORPTION; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING FILMS; SILICA; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; RAMAN DIFFUSION; REACTIVE SPUTTERING;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0037582119 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(97)00174-8 Document Type: Article

Times cited : (17)

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