Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films

Thin Solid Films

Volumn 354, Issue 1, 1999, Pages 256-261

  Ruffner, J A ^a   Clem, P G ^a   Tuttle, B A ^a   Dimos, D ^a   Gonzales, D M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CRYSTAL ORIENTATION; DEPOSITION; ELECTROCHEMICAL ELECTRODES; INTERFACES (MATERIALS); PIEZOELECTRIC MATERIALS; SUBSTRATES; SURFACE STRUCTURE; THIN FILMS;

PIEZOELECTRIC RESPONSE;

DIELECTRIC FILMS;

EID: 0033365336     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00521-0     Document Type: Article

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